Proton beam writing: A progress review

Proton beam writing: A progress review

International Journal of Nanotechnology

Saved in:
Bibliographic Details
Main Authors: Van Kan, J.A., Bettiol, A.A., Ansari, K., Teo, E.J., Sum, T.C., Watt, F.
Other Authors: PHYSICS
Format: Review
Published: 2014
Subjects:
Direct write
High aspect ratio
Nano imprinting
PMMA
Proton beam writing
SU-8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/99016
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:International Journal of Nanotechnology

Similar Items