Proton beam writing: A progress review

Proton beam writing: A progress review

International Journal of Nanotechnology

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Bibliographic Details
Main Authors:	Van Kan, J.A., Bettiol, A.A., Ansari, K., Teo, E.J., Sum, T.C., Watt, F.
Other Authors:	PHYSICS
Format:	Review
Published:	2014
Subjects:	Direct write High aspect ratio Nano imprinting PMMA Proton beam writing SU-8
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/99016
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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