Proton beam writing: A progress review

International Journal of Nanotechnology

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Bibliographic Details
Main Authors:	Van Kan, J.A., Bettiol, A.A., Ansari, K., Teo, E.J., Sum, T.C., Watt, F.
Other Authors:	PHYSICS
Format:	Review
Published:	2014
Subjects:	Direct write High aspect ratio Nano imprinting PMMA Proton beam writing SU-8
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/99016
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-99016
record_format	dspace
spelling	sg-nus-scholar.10635-990162015-01-17T01:52:12Z Proton beam writing: A progress review Van Kan, J.A. Bettiol, A.A. Ansari, K. Teo, E.J. Sum, T.C. Watt, F. PHYSICS Direct write High aspect ratio Nano imprinting PMMA Proton beam writing SU-8 International Journal of Nanotechnology 1 4 464-479 2014-10-16T09:54:10Z 2014-10-16T09:54:10Z 2004 Review Van Kan, J.A.,Bettiol, A.A.,Ansari, K.,Teo, E.J.,Sum, T.C.,Watt, F. (2004). Proton beam writing: A progress review. International Journal of Nanotechnology 1 (4) : 464-479. ScholarBank@NUS Repository. 14757435 http://scholarbank.nus.edu.sg/handle/10635/99016 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Direct write High aspect ratio Nano imprinting PMMA Proton beam writing SU-8
spellingShingle	Direct write High aspect ratio Nano imprinting PMMA Proton beam writing SU-8 Van Kan, J.A. Bettiol, A.A. Ansari, K. Teo, E.J. Sum, T.C. Watt, F. Proton beam writing: A progress review
description	International Journal of Nanotechnology
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Bettiol, A.A. Ansari, K. Teo, E.J. Sum, T.C. Watt, F.
format	Review
author	Van Kan, J.A. Bettiol, A.A. Ansari, K. Teo, E.J. Sum, T.C. Watt, F.
author_sort	Van Kan, J.A.
title	Proton beam writing: A progress review
title_short	Proton beam writing: A progress review
title_full	Proton beam writing: A progress review
title_fullStr	Proton beam writing: A progress review
title_full_unstemmed	Proton beam writing: A progress review
title_sort	proton beam writing: a progress review
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/99016
_version_	1681092131624583168

Proton beam writing: A progress review

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