Proton beam writing: A progress review

Proton beam writing: A progress review

International Journal of Nanotechnology

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Bibliographic Details
Main Authors: Van Kan, J.A., Bettiol, A.A., Ansari, K., Teo, E.J., Sum, T.C., Watt, F.
Other Authors: PHYSICS
Format: Review
Published: 2014
Subjects:
Direct write
High aspect ratio
Nano imprinting
PMMA
Proton beam writing
SU-8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/99016
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/99016

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