Proton beam writing: A progress review

• Main Authors: Van Kan, J.A., Bettiol, A.A., Ansari, K., Teo, E.J., Sum, T.C., Watt, F.
• Other Authors: PHYSICS
• Format: Review
• Published: 2014
• Subjects: Direct write; High aspect ratio; Nano imprinting; PMMA; Proton beam writing; SU-8
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/99016
• Institution: National University of Singapore

International Journal of Nanotechnology