Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

Au, Au-V solid solution, and Au-V2O5dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for t...

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書目詳細資料
Main Authors:	T. Bannuru, S. Narksitipan, W. L. Brown, R. P. Vinci
格式:	Conference Proceeding
出版:	2018
主題:	Engineering Physics and Astronomy
在線閱讀:	https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=34247356929&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/61087
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