Study of copper diffusion into Ta and TaN barrier materials for MOS devices

بواسطة Loh, S.W., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S.
منشور في 2014

Study of copper diffusion into tantalum nitride (Ta2N) by rapid thermal annealing (RTA)

بواسطة Loh, S.W., Zhang, D.H., Liu, R., Li, C.Y., Wee, A.T.S.
منشور في 2014

Study of copper diffusion into tantalum and tantalum diffusion into copper

بواسطة Loh, S.W., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S.
منشور في 2014

Investigation of metal-organic chemical vapor deposited copper diffusion in tantalum after annealing

بواسطة Loh, S.W., Zhang, D.H., Liu, R., Li, C.Y., Wee, A.T.S.
منشور في 2014

Study of interactions between α-Ta films and SiO2 under rapid thermal annealing

بواسطة Yuan, Z.L., Zhang, D.H., Li, C.Y., Prasad, K., Tan, C.M.
منشور في 2014

Thermal stability of Cu/α-Ta/SiO2/Si structures

بواسطة Yuan, Z.L., Zhang, D.H., Li, C.Y., Prasad, K., Tan, C.M.
منشور في 2014

Thermal stability of Cu/Ta/ultra low k porous polymer structures for multilevel interconnects

بواسطة Zhang, D.H., Yang, L.Y., Li, C.Y., Liu, R., Wee, A.T.S., Foo, P.D.
منشور في 2014

Characterization of Cu/Ta/ultra low-k porous polymer structures for multilevel interconnects

بواسطة Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S., Foo, P.D.
منشور في 2014

Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM

بواسطة Teh, W.H., Koh, L.T., Chen, S.M., Xie, J., Li, C.Y., Foo, P.D.
منشور في 2014

Comparative study of Ta and TaN(N) in the barrier/ultra low k structures for deep submicron integrated circuits

بواسطة Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Wee, A.T.S., Foo, P.D.
منشور في 2014

Comparative investigation of TaN and SiCN barrier layer for Cu/ultra low k integration

بواسطة Yang, L.Y., Zhang, D.H., Li, C.Y., Liu, R., Lu, P.W., Foo, P.D., Wee, A.T.S.
منشور في 2014

Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures

بواسطة Zhang, D.H., Loh, S.W., Li, C.Y., Foo, P.D., Xie, J., Liu, R., Wee, A.T.S., Zhang, L., Lee, Y.K.
منشور في 2014

A mass vaccination campaign targeting adults and children to prevent typhoid fever in Hechi; Expanding the use of Vi polysaccharide vaccine in Southeast China: A cluster-randomized...

بواسطة Yang, J, Acosta, C.J, Si, G.-A, Zeng, J, Li, C.-Y, Liang, D, Ochiai, R.L, Page, A.-L, Danovaro-Holliday, M.C, Zhang, J, Zhou, B.-D, Liao, H.-Z, Wang, M.-L, Tan, D.-M, Tang, Z.-Z, Gong, J, Park, J.-K, Ali, M, Ivanoff, B, Liang, G.-C, Yang, H.-H, Pang, T, Xu, Z.-Y, Donner, A, Galindo, C.M, Dong, B.-Q, Clemens, J.D
منشور في 2020