Effect of Hydrogen Dilution to The Result of Silicon Nanowire Growth Grown by HWC-in Plasma-VHF-PECVD on a Silver Catalyst
Silicon nanowire (SiNW) were grown on an object-glass substrate using HWC-in plasma-VHF-PECVD and catalyzed by silver nanocatalyst. Two kind of silver thin film, each made by evaporate 10 and 2,5 mg of silver were annealed at 3800C for a different annealing time, in this case is 40 and 1 minute. Cha...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/20133 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |