THE EFFECT OF ALUMINIUM DOPANT ON THE STRUCTURE, OPTICAL AND ELECTRICAL PROPERTIES OF THIN FILMS ZNO GROWTH BY DC-UNBALANCED MAGNETRON SPUTTERING
This research is purpose to analyze the effect of aluminium dopant on ZnO materials with various consentrasions and looking the structural, optical and electrical properties and their application for optoelectronic device. Al:ZnO is grown at room temperature and compared with pure ZnO with the same...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/49466 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |