Copper diffusion barrier performance of amorphous Ta-Ni thin films

• Main Authors: Yan, Hua, Tay, Yee Yan, Jiang, Yueyue, Yantara, Natalia, Pan, Jisheng, Liang, Meng Heng, Chen, Zhong
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/100648; http://hdl.handle.net/10220/11040
• Institution: Nanyang Technological University

Amorphous Ta–Ni thin films were deposited on Si substrate by magnetron sputtering. The oxygen concentration was adjusted by controlling the substrate bias during the sputtering deposition. Two types of Ta–Ni films, namely Ta67.34Ni27.06O5.60 and Ta73.25Ni26.10O0.65 were employed in the current study...