Black germanium photodetector exceeds external quantum efficiency of 160%
In this work, a viable method is demonstrated to realize high-performance germanium (Ge) photodetectors (PDs) on the nanostructured Ge surface, namely black Ge, formed by chlorine (Cl2) gas-based reactive ion etching at room temperature. Black Ge surface has spike-like pyramidal structures with a wi...
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2022
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/156884 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |