Characterization of oxide interface charges in trench field stop IGBT

Characterization of oxide interface charges in trench field stop IGBT

Oxide interface charges is an important factor to be assessed in technology development especially for a trench-gated power device. The plasma reactive ion etching process is used to form highly vertical trenches whereby the oxide-silicon interface is often saturated by large amount of oxide interfa...

Saved in:

書目詳細資料
Main Authors:	Sim, Zhi Lin, Chin, Wei Mien, Bong, Yi Xiang, Goh, David Eng Hui, Ngwan, Voon Cheng
其他作者:	School of Materials Science and Engineering
格式:	Conference or Workshop Item
語言:	English
出版:	2024
主題:	Engineering Trench power device Oxide interface charges Forming gas annealing
在線閱讀:	https://hdl.handle.net/10356/175647
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University
語言:	English

相似書籍

Comprehensive BTI reliability study on trench field-stop IGBT under different applications
由: Sim, Zhi Lin
出版: (2024)

Trench oxide interface states & BTI reliability in IGBT device
由: Sim, Zhi Lin,, et al.
出版: (2025)

Reduction of high-speed train-induced building vibrations by protective trenches
由: Sun, W., et al.
出版: (2014)

CHARGE GENERATION AND CHARGE DISSIPATION AT INTERFACES OF MATTER
由: AO CHI KIT
出版: (2023)

Queues and artificial potential trenches for multirobot formations
由: Ge, S.S., et al.
出版: (2014)

Multi-robot formations: Queues and artificial potential trenches
由: Ge, S.S., et al.
出版: (2014)

Oxide charge evolution under crystallization of amorphous LieNbeO films
由: Sumets, M., et al.
出版: (2020)

Correlation between charge pumping method and direct-current current voltage method in p-type metal-oxide-semiconductor field-effect transistors
由: Jie, B.-B., et al.
出版: (2014)

Teleseismic waveform complexities caused by near trench structures and their impacts on earthquake source study : application to the 2015 Illapel aftershocks (Central Chile)
由: Qian, Yunyi, et al.
出版: (2019)

Interaction of interface-traps located at various sites in MOSFETs under stress
由: Chen, G., et al.
出版: (2014)

Diagram representations of charge pumping processes in CMOS transistors
由: Xinyun, H., et al.
出版: (2014)

Characteristic Lengths of Interlayer Charge Transfer in Correlated Oxide Heterostructures
由: Omar, Ganesh Ji, et al.
出版: (2020)

CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL
由: ONG KNG YIH
出版: (2019)

Effects of rapid thermal annealing time and ambient temperature on the charge storage capability of SiO2/pure Ge/rapid thermal oxide memory structure
由: Heng, C.L., et al.
出版: (2014)

Singapore Management University Initiates Archaeological Trial-trenching at Bras Basah City Campus Site
由: Singapore Management University
出版: (2000)

PROBING CHARGE TRANSPORT AND INTERFACE PROPERTIES OF PLANAR AND MESOPOROUS PEROVSKITE BASED SOLAR CELLS
由: MILOS PETROVIC
出版: (2018)

Nonlinear circuit quantum electrodynamics based on the charge-qubit–resonator interface
由: Yu, Deshui, et al.
出版: (2019)

Tuning the conductivity threshold and carrier density of two-dimensional electron gas at oxide interfaces through interface engineering
由: Ma, H.J.H, et al.
出版: (2020)

ELECTRIFICATION AT INTERFACES: FUNDAMENTALS AND APPLICATIONS
由: SUN YAJUAN
出版: (2018)

Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon
由: Chan, Y.M., et al.
出版: (2014)

Room-temperature charge-to-spin conversion from quasi-2D electron gas at SrTiO₃-based interfaces
由: Shashank, Utkarsh, et al.
出版: (2023)

Weak distance dependence of hot-electron-transfer rates at the interface between monolayer MoS₂ and gold
由: Xu, Ce, et al.
出版: (2022)

Plasma charging damage in deep sub-micron CMOS devices
由: TEO WEI YEE, JOCELYN
出版: (2010)

Study of TaOx-based resistive Random Access Memory
由: WU WENJUAN
出版: (2012)

Charge Transport and Thermal Properties of A Semicrystalline Polymer Semiconductor
由: ZHAO LIHONG
出版: (2011)

Bio-catalyzed oxidation self-charging zinc-polymer batteries
由: Pan, Jun, et al.
出版: (2024)

Vacancy pair-induced charge rebalancing with surface and interfacial dual polarization for CO₂ photoreduction
由: Di, Jun, et al.
出版: (2023)

INTERFACE ENGINEERING FOR EFFICIENT PEROVSKITE SOLAR CELLS
由: YE TAO
出版: (2018)

Stability of charges in titanium compounds and charge transfer to oxygen in titanium dioxide
由: Koch, D., et al.
出版: (2020)

Design of a device for simultaneous particle size and electrostatic charge measurement of inhalation drugs
由: Zhu, K., et al.
出版: (2014)

Interface study of high-k oxide and Ge for the future Ge based MOSFET device
由: DENG WENSHENG
出版: (2012)

Simultaneous enhancement in charge separation and onset potential for water oxidation in a BiVO4 photoanode by W – Ti codoping
由: Zhao, Xin, et al.
出版: (2019)

Novel bipolar TaOx-based resistive random access memory
由: Wu, W., et al.
出版: (2014)

CHARACTERIZATION OF POWERMOSFET
由: SOO HAW YUN
出版: (2019)

Impact damage on pipe-in-pipe systems
由: Zheng, J., et al.
出版: (2014)

A modified charge-pumping method for the cxharacterization of interface-trap generation in MOSFETs
由: Huang, D., et al.
出版: (2014)

BEEM studies of metal-organic interfaces
由: ZHENG YI
出版: (2010)

Design of integrated current sensor for lateral IGBT power devices
由: Liang, Y.C., et al.
出版: (2014)

Modifying the molecular structure and gas separation performance of thermally labile polyimide-based membranes for enhanced natural gas purification
由: Chua, M.L., et al.
出版: (2014)

Direct utilization of photoinduced charge carriers to promote electrochemical energy storage
由: Ren, Yuanfu, et al.
出版: (2022)