Influence of bias power and doping of Si on hardness and toughness of CrAlN

• Main Author: Chan, Kristel Hui Yan.
• Other Authors: Sam Zhang Shanyong
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/46149
• Institution: Nanyang Technological University

This project focused on the study of the influence of bias power and concentration of doped silicon on the hardness and toughness of CrAlN thin films. Reactive magnetron sputtering was used to prepare CrAlN and CrAlSiN thin films by sputtering the CrAl target and co-sputtering CrAl/Si targets respec...