The electronic barrier height of silicon native oxides at different oxidation stages

A systematic study on silicon native oxides grown in ambient air at room temperature is carried out using ballistic electron emission microscopy. The electronic barrier height of Au/native oxide was directly measured for native oxides at different oxidation stages. While the ballistic electron trans...

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Bibliographic Details
Main Authors: Qin, H. L., Goh, K. E. J., Troadec, C., Bosman, Michel, Pey, Kin Leong
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/95358
http://hdl.handle.net/10220/9206
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Institution: Nanyang Technological University
Language: English

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