Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition

10.1063/1.1534381

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Bibliographic Details
Main Authors:	Ho, M.-Y., Gong, H., Wilk, G.D., Busch, B.W., Green, M.L., Voyles, P.M., Muller, D.A., Bude, M., Lin, W.H., See, A., Loomans, M.E., Lahiri, S.K., Räisänen, P.I.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/107131
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-107131
record_format	dspace
spelling	sg-nus-scholar.10635-1071312023-10-26T20:39:32Z Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition Ho, M.-Y. Gong, H. Wilk, G.D. Busch, B.W. Green, M.L. Voyles, P.M. Muller, D.A. Bude, M. Lin, W.H. See, A. Loomans, M.E. Lahiri, S.K. Räisänen, P.I. MATERIALS SCIENCE 10.1063/1.1534381 Journal of Applied Physics 93 3 1477-1481 JAPIA 2014-10-29T08:39:53Z 2014-10-29T08:39:53Z 2003-02-01 Article Ho, M.-Y., Gong, H., Wilk, G.D., Busch, B.W., Green, M.L., Voyles, P.M., Muller, D.A., Bude, M., Lin, W.H., See, A., Loomans, M.E., Lahiri, S.K., Räisänen, P.I. (2003-02-01). Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition. Journal of Applied Physics 93 (3) : 1477-1481. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1534381 00218979 http://scholarbank.nus.edu.sg/handle/10635/107131 000180630200022 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1534381
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Ho, M.-Y. Gong, H. Wilk, G.D. Busch, B.W. Green, M.L. Voyles, P.M. Muller, D.A. Bude, M. Lin, W.H. See, A. Loomans, M.E. Lahiri, S.K. Räisänen, P.I.
format	Article
author	Ho, M.-Y. Gong, H. Wilk, G.D. Busch, B.W. Green, M.L. Voyles, P.M. Muller, D.A. Bude, M. Lin, W.H. See, A. Loomans, M.E. Lahiri, S.K. Räisänen, P.I.
spellingShingle	Ho, M.-Y. Gong, H. Wilk, G.D. Busch, B.W. Green, M.L. Voyles, P.M. Muller, D.A. Bude, M. Lin, W.H. See, A. Loomans, M.E. Lahiri, S.K. Räisänen, P.I. Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
author_sort	Ho, M.-Y.
title	Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
title_short	Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
title_full	Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
title_fullStr	Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
title_full_unstemmed	Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
title_sort	morphology and crystallization kinetics in hfo2 thin films grown by atomic layer deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/107131
_version_	1781788342998794240

Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition

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