Proton beam writing: A platform technology for nanowire production
10.1007/s00542-007-0514-y
Saved in:
Main Authors: | Van Kan, J.A., Zhang, F., Chiam, S.Y., Osipowicz, T., Bettiol, A.A., Watt, F. |
---|---|
Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/112670 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Proton beam writing: A platform technology for nano-integration
by: Van Kan, J.A., et al.
Published: (2014) -
Proton beam writing
by: Watt, F., et al.
Published: (2014) -
Three-dimensional nanolithography using proton beam writing
by: Van Kan, J.A., et al.
Published: (2014) -
Sidewall quality in proton beam writing
by: Chiam, S.Y., et al.
Published: (2014) -
Proton beam writing: A tool for high-aspect ratio mask production
by: Van Kan, J.A., et al.
Published: (2014)