Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM

10.1016/S0026-2714(03)00261-0

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Main Authors: Pey, K.L., Tung, C.H., Radhakrishnan, M.K., Tang, L.J., Sun, Y., Wang, X.D., Lin, W.H.
Other Authors: INSTITUTE OF MICROELECTRONICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/112974
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spelling sg-nus-scholar.10635-1129742023-10-25T21:39:24Z Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM Pey, K.L. Tung, C.H. Radhakrishnan, M.K. Tang, L.J. Sun, Y. Wang, X.D. Lin, W.H. INSTITUTE OF MICROELECTRONICS 10.1016/S0026-2714(03)00261-0 Microelectronics Reliability 43 9-11 1471-1476 MCRLA 2014-11-28T08:12:53Z 2014-11-28T08:12:53Z 2003-09 Conference Paper Pey, K.L., Tung, C.H., Radhakrishnan, M.K., Tang, L.J., Sun, Y., Wang, X.D., Lin, W.H. (2003-09). Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM. Microelectronics Reliability 43 (9-11) : 1471-1476. ScholarBank@NUS Repository. https://doi.org/10.1016/S0026-2714(03)00261-0 00262714 http://scholarbank.nus.edu.sg/handle/10635/112974 000185791500021 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1016/S0026-2714(03)00261-0
author2 INSTITUTE OF MICROELECTRONICS
author_facet INSTITUTE OF MICROELECTRONICS
Pey, K.L.
Tung, C.H.
Radhakrishnan, M.K.
Tang, L.J.
Sun, Y.
Wang, X.D.
Lin, W.H.
format Conference or Workshop Item
author Pey, K.L.
Tung, C.H.
Radhakrishnan, M.K.
Tang, L.J.
Sun, Y.
Wang, X.D.
Lin, W.H.
spellingShingle Pey, K.L.
Tung, C.H.
Radhakrishnan, M.K.
Tang, L.J.
Sun, Y.
Wang, X.D.
Lin, W.H.
Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM
author_sort Pey, K.L.
title Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM
title_short Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM
title_full Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM
title_fullStr Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM
title_full_unstemmed Correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nMOSFETs by TEM
title_sort correlation of failure mechanism of constant-current-stress and constant-voltage-stress breakdowns in ultrathin gate oxides of nmosfets by tem
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/112974
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