Study of copper suicide retardation effects on copper diffusion in silicon

10.1063/1.1343518

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Bibliographic Details
Main Authors:	Lee, C.S., Gong, H., Liu, R., Wee, A.T.S., Cha, C.L., See, A., Chan, L.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113104
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113104
record_format	dspace
spelling	sg-nus-scholar.10635-1131042023-10-26T21:50:04Z Study of copper suicide retardation effects on copper diffusion in silicon Lee, C.S. Gong, H. Liu, R. Wee, A.T.S. Cha, C.L. See, A. Chan, L. INSTITUTE OF ENGINEERING SCIENCE MATERIALS SCIENCE PHYSICS 10.1063/1.1343518 Journal of Applied Physics 90 8 3822-3824 JAPIA 2014-11-28T09:12:03Z 2014-11-28T09:12:03Z 2001-10 Article Lee, C.S., Gong, H., Liu, R., Wee, A.T.S., Cha, C.L., See, A., Chan, L. (2001-10). Study of copper suicide retardation effects on copper diffusion in silicon. Journal of Applied Physics 90 (8) : 3822-3824. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1343518 00218979 http://scholarbank.nus.edu.sg/handle/10635/113104 000171562100020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1343518
author2	INSTITUTE OF ENGINEERING SCIENCE
author_facet	INSTITUTE OF ENGINEERING SCIENCE Lee, C.S. Gong, H. Liu, R. Wee, A.T.S. Cha, C.L. See, A. Chan, L.
format	Article
author	Lee, C.S. Gong, H. Liu, R. Wee, A.T.S. Cha, C.L. See, A. Chan, L.
spellingShingle	Lee, C.S. Gong, H. Liu, R. Wee, A.T.S. Cha, C.L. See, A. Chan, L. Study of copper suicide retardation effects on copper diffusion in silicon
author_sort	Lee, C.S.
title	Study of copper suicide retardation effects on copper diffusion in silicon
title_short	Study of copper suicide retardation effects on copper diffusion in silicon
title_full	Study of copper suicide retardation effects on copper diffusion in silicon
title_fullStr	Study of copper suicide retardation effects on copper diffusion in silicon
title_full_unstemmed	Study of copper suicide retardation effects on copper diffusion in silicon
title_sort	study of copper suicide retardation effects on copper diffusion in silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113104
_version_	1781789167780364288

Study of copper suicide retardation effects on copper diffusion in silicon

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