Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures

10.1016/S0218-625X(01)00127-0

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Bibliographic Details
Main Authors:	Zhang, D.H., Loh, S.W., Li, C.Y., Foo, P.D., Xie, J., Liu, R., Wee, A.T.S., Zhang, L., Lee, Y.K.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113105
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113105
record_format	dspace
spelling	sg-nus-scholar.10635-1131052015-03-02T17:58:31Z Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures Zhang, D.H. Loh, S.W. Li, C.Y. Foo, P.D. Xie, J. Liu, R. Wee, A.T.S. Zhang, L. Lee, Y.K. INSTITUTE OF ENGINEERING SCIENCE PHYSICS 10.1016/S0218-625X(01)00127-0 Surface Review and Letters 8 5 527-532 SRLEF 2014-11-28T09:12:04Z 2014-11-28T09:12:04Z 2001 Article Zhang, D.H.,Loh, S.W.,Li, C.Y.,Foo, P.D.,Xie, J.,Liu, R.,Wee, A.T.S.,Zhang, L.,Lee, Y.K. (2001). Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures. Surface Review and Letters 8 (5) : 527-532. ScholarBank@NUS Repository. <a href="https://doi.org/10.1016/S0218-625X(01)00127-0" target="_blank">https://doi.org/10.1016/S0218-625X(01)00127-0</a> 0218625X http://scholarbank.nus.edu.sg/handle/10635/113105 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1016/S0218-625X(01)00127-0
author2	INSTITUTE OF ENGINEERING SCIENCE
author_facet	INSTITUTE OF ENGINEERING SCIENCE Zhang, D.H. Loh, S.W. Li, C.Y. Foo, P.D. Xie, J. Liu, R. Wee, A.T.S. Zhang, L. Lee, Y.K.
format	Article
author	Zhang, D.H. Loh, S.W. Li, C.Y. Foo, P.D. Xie, J. Liu, R. Wee, A.T.S. Zhang, L. Lee, Y.K.
spellingShingle	Zhang, D.H. Loh, S.W. Li, C.Y. Foo, P.D. Xie, J. Liu, R. Wee, A.T.S. Zhang, L. Lee, Y.K. Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures
author_sort	Zhang, D.H.
title	Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures
title_short	Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures
title_full	Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures
title_fullStr	Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures
title_full_unstemmed	Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures
title_sort	study of cu diffusion in cu/tan/sio2/si multilayer structures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113105
_version_	1681094604184616960

Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures

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