Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures

• Main Authors: Zhang, D.H., Loh, S.W., Li, C.Y., Foo, P.D., Xie, J., Liu, R., Wee, A.T.S., Zhang, L., Lee, Y.K.
• Other Authors: INSTITUTE OF ENGINEERING SCIENCE
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/113105
• Institution: National University of Singapore

10.1016/S0218-625X(01)00127-0