Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures

Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structures

10.1016/S0218-625X(01)00127-0

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Bibliographic Details
Main Authors:	Zhang, D.H., Loh, S.W., Li, C.Y., Foo, P.D., Xie, J., Liu, R., Wee, A.T.S., Zhang, L., Lee, Y.K.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113105
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Institution:	National University of Singapore

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