SIMS backside depth profiling of ultra shallow implants

SIMS backside depth profiling of ultra shallow implants

10.1016/S0169-4332(02)00671-2

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Bibliographic Details
Main Authors: Yeo, K.L., Wee, A.T.S., See, A., Liu, R., Ng, C.M.
Other Authors: INSTITUTE OF ENGINEERING SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Backside SIMS
Oxygen flooding
Sample rotation
Secondary ion mass spectrometry
Ultra shallow implants
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113117
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Institution: National University of Singapore
id sg-nus-scholar.10635-113117
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spelling sg-nus-scholar.10635-1131172023-10-25T22:07:48Z SIMS backside depth profiling of ultra shallow implants Yeo, K.L. Wee, A.T.S. See, A. Liu, R. Ng, C.M. INSTITUTE OF ENGINEERING SCIENCE PHYSICS Backside SIMS Oxygen flooding Sample rotation Secondary ion mass spectrometry Ultra shallow implants 10.1016/S0169-4332(02)00671-2 Applied Surface Science 203-204 335-338 ASUSE 2014-11-28T09:12:13Z 2014-11-28T09:12:13Z 2003-01-15 Conference Paper Yeo, K.L., Wee, A.T.S., See, A., Liu, R., Ng, C.M. (2003-01-15). SIMS backside depth profiling of ultra shallow implants. Applied Surface Science 203-204 : 335-338. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(02)00671-2 01694332 http://scholarbank.nus.edu.sg/handle/10635/113117 000180527300076 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Backside SIMS
Oxygen flooding
Sample rotation
Secondary ion mass spectrometry
Ultra shallow implants
spellingShingle Backside SIMS
Oxygen flooding
Sample rotation
Secondary ion mass spectrometry
Ultra shallow implants
Yeo, K.L.
Wee, A.T.S.
See, A.
Liu, R.
Ng, C.M.
SIMS backside depth profiling of ultra shallow implants
description 10.1016/S0169-4332(02)00671-2
author2 INSTITUTE OF ENGINEERING SCIENCE
author_facet INSTITUTE OF ENGINEERING SCIENCE
Yeo, K.L.
Wee, A.T.S.
See, A.
Liu, R.
Ng, C.M.
format Conference or Workshop Item
author Yeo, K.L.
Wee, A.T.S.
See, A.
Liu, R.
Ng, C.M.
author_sort Yeo, K.L.
title SIMS backside depth profiling of ultra shallow implants
title_short SIMS backside depth profiling of ultra shallow implants
title_full SIMS backside depth profiling of ultra shallow implants
title_fullStr SIMS backside depth profiling of ultra shallow implants
title_full_unstemmed SIMS backside depth profiling of ultra shallow implants
title_sort sims backside depth profiling of ultra shallow implants
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/113117
_version_ 1781789169311285248

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