Effects of first rapid thermal annealing temperature on Co silicide formation

10.1016/S0038-1101(03)00008-X

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Bibliographic Details
Main Authors:	Peng, H.J., Shen, Z.X., Lim, E.H., Lai, C.W., Liu, R., Wee, A.T.S., Sameer, A., Dai, J.Y., Zhang, B.C., Zheng, J.Z.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/116312
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-116312
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spelling	sg-nus-scholar.10635-1163122023-10-26T09:00:55Z Effects of first rapid thermal annealing temperature on Co silicide formation Peng, H.J. Shen, Z.X. Lim, E.H. Lai, C.W. Liu, R. Wee, A.T.S. Sameer, A. Dai, J.Y. Zhang, B.C. Zheng, J.Z. INSTITUTE OF ENGINEERING SCIENCE PHYSICS 10.1016/S0038-1101(03)00008-X Solid-State Electronics 47 8 1249-1253 SSELA 2014-12-12T07:48:20Z 2014-12-12T07:48:20Z 2003-08 Article Peng, H.J., Shen, Z.X., Lim, E.H., Lai, C.W., Liu, R., Wee, A.T.S., Sameer, A., Dai, J.Y., Zhang, B.C., Zheng, J.Z. (2003-08). Effects of first rapid thermal annealing temperature on Co silicide formation. Solid-State Electronics 47 (8) : 1249-1253. ScholarBank@NUS Repository. https://doi.org/10.1016/S0038-1101(03)00008-X 00381101 http://scholarbank.nus.edu.sg/handle/10635/116312 000183226500001 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/S0038-1101(03)00008-X
author2	INSTITUTE OF ENGINEERING SCIENCE
author_facet	INSTITUTE OF ENGINEERING SCIENCE Peng, H.J. Shen, Z.X. Lim, E.H. Lai, C.W. Liu, R. Wee, A.T.S. Sameer, A. Dai, J.Y. Zhang, B.C. Zheng, J.Z.
format	Article
author	Peng, H.J. Shen, Z.X. Lim, E.H. Lai, C.W. Liu, R. Wee, A.T.S. Sameer, A. Dai, J.Y. Zhang, B.C. Zheng, J.Z.
spellingShingle	Peng, H.J. Shen, Z.X. Lim, E.H. Lai, C.W. Liu, R. Wee, A.T.S. Sameer, A. Dai, J.Y. Zhang, B.C. Zheng, J.Z. Effects of first rapid thermal annealing temperature on Co silicide formation
author_sort	Peng, H.J.
title	Effects of first rapid thermal annealing temperature on Co silicide formation
title_short	Effects of first rapid thermal annealing temperature on Co silicide formation
title_full	Effects of first rapid thermal annealing temperature on Co silicide formation
title_fullStr	Effects of first rapid thermal annealing temperature on Co silicide formation
title_full_unstemmed	Effects of first rapid thermal annealing temperature on Co silicide formation
title_sort	effects of first rapid thermal annealing temperature on co silicide formation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/116312
_version_	1781789499711291392

Effects of first rapid thermal annealing temperature on Co silicide formation

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