Silicon surface passivation by aluminium oxide studied with electron energy loss spectroscopy

Silicon surface passivation by aluminium oxide studied with electron energy loss spectroscopy

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS

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Bibliographic Details
Main Authors: Hoex, Bram, Bosman, Michel, Nandakumar, Naomi, Kessels, WMM
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Language:English
Published: WILEY-V C H VERLAG GMBH 2019
Subjects:
Science & Technology
Technology
Physical Sciences
Materials Science, Multidisciplinary
Physics, Applied
Physics, Condensed Matter
Materials Science
Physics
surface passivation
Al2O3
electron energy loss spectroscopy
silicon
wafers
solar cells
CHEMICAL-VAPOR-DEPOSITION
ATOMIC-LAYER-DEPOSITION
ALD AL2O3
SI
RECOMBINATION
Online Access:https://scholarbank.nus.edu.sg/handle/10635/155058
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Institution: National University of Singapore
Language: English

Internet

https://scholarbank.nus.edu.sg/handle/10635/155058

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