Silicon surface passivation by aluminium oxide studied with electron energy loss spectroscopy

Silicon surface passivation by aluminium oxide studied with electron energy loss spectroscopy

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS

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Bibliographic Details
Main Authors:	Hoex, Bram, Bosman, Michel, Nandakumar, Naomi, Kessels, WMM
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Language:	English
Published:	WILEY-V C H VERLAG GMBH 2019
Subjects:	Science & Technology Technology Physical Sciences Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Materials Science Physics surface passivation Al2O3 electron energy loss spectroscopy silicon wafers solar cells CHEMICAL-VAPOR-DEPOSITION ATOMIC-LAYER-DEPOSITION ALD AL2O3 SI RECOMBINATION
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/155058
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Institution:	National University of Singapore
Language:	English

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