Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors
10.1063/1.1871351
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sg-nus-scholar.10635-564722023-10-29T23:03:08Z Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors Ang, K.-W. Chui, K.-J. Bliznetsov, V. Tung, C.-H. Du, A. Balasubramanian, N. Samudra, G. Li, M.F. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1871351 Applied Physics Letters 86 9 1-3 APPLA 2014-06-17T02:54:58Z 2014-06-17T02:54:58Z 2005-02-28 Article Ang, K.-W., Chui, K.-J., Bliznetsov, V., Tung, C.-H., Du, A., Balasubramanian, N., Samudra, G., Li, M.F., Yeo, Y.-C. (2005-02-28). Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors. Applied Physics Letters 86 (9) : 1-3. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1871351 00036951 http://scholarbank.nus.edu.sg/handle/10635/56472 000228991600053 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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10.1063/1.1871351 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Ang, K.-W. Chui, K.-J. Bliznetsov, V. Tung, C.-H. Du, A. Balasubramanian, N. Samudra, G. Li, M.F. Yeo, Y.-C. |
| format |
Article |
| author |
Ang, K.-W. Chui, K.-J. Bliznetsov, V. Tung, C.-H. Du, A. Balasubramanian, N. Samudra, G. Li, M.F. Yeo, Y.-C. |
| spellingShingle |
Ang, K.-W. Chui, K.-J. Bliznetsov, V. Tung, C.-H. Du, A. Balasubramanian, N. Samudra, G. Li, M.F. Yeo, Y.-C. Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors |
| author_sort |
Ang, K.-W. |
| title |
Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors |
| title_short |
Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors |
| title_full |
Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors |
| title_fullStr |
Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors |
| title_full_unstemmed |
Lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors |
| title_sort |
lattice strain analysis of transistor structures with silicon-germanium and silicon-carbon sourcedrain stressors |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56472 |
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1781781185789165568 |