Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

10.1016/j.tsf.2011.10.211

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Bibliographic Details
Main Authors:	Song, X., Yeap, K.B., Zhu, J., Belnoue, J., Sebastiani, M., Bemporad, E., Zeng, K., Korsunsky, A.M.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Digital image correlation Focused Ion Beam Residual stress Strain relief function
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61229
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-61229
record_format	dspace
spelling	sg-nus-scholar.10635-612292023-10-25T21:19:36Z Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging Song, X. Yeap, K.B. Zhu, J. Belnoue, J. Sebastiani, M. Bemporad, E. Zeng, K. Korsunsky, A.M. MECHANICAL ENGINEERING Digital image correlation Focused Ion Beam Residual stress Strain relief function 10.1016/j.tsf.2011.10.211 Thin Solid Films 520 6 2073-2076 THSFA 2014-06-17T06:32:35Z 2014-06-17T06:32:35Z 2012-01-01 Article Song, X., Yeap, K.B., Zhu, J., Belnoue, J., Sebastiani, M., Bemporad, E., Zeng, K., Korsunsky, A.M. (2012-01-01). Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging. Thin Solid Films 520 (6) : 2073-2076. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2011.10.211 00406090 http://scholarbank.nus.edu.sg/handle/10635/61229 000300459200073 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Digital image correlation Focused Ion Beam Residual stress Strain relief function
spellingShingle	Digital image correlation Focused Ion Beam Residual stress Strain relief function Song, X. Yeap, K.B. Zhu, J. Belnoue, J. Sebastiani, M. Bemporad, E. Zeng, K. Korsunsky, A.M. Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
description	10.1016/j.tsf.2011.10.211
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Song, X. Yeap, K.B. Zhu, J. Belnoue, J. Sebastiani, M. Bemporad, E. Zeng, K. Korsunsky, A.M.
format	Article
author	Song, X. Yeap, K.B. Zhu, J. Belnoue, J. Sebastiani, M. Bemporad, E. Zeng, K. Korsunsky, A.M.
author_sort	Song, X.
title	Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
title_short	Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
title_full	Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
title_fullStr	Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
title_full_unstemmed	Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
title_sort	residual stress measurement in thin films at sub-micron scale using focused ion beam milling and imaging
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/61229
_version_	1781782007297081344

Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

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