Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

• Main Authors: Song, X., Yeap, K.B., Zhu, J., Belnoue, J., Sebastiani, M., Bemporad, E., Zeng, K., Korsunsky, A.M.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Digital image correlation; Focused Ion Beam; Residual stress; Strain relief function
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/61229
• Institution: National University of Singapore

10.1016/j.tsf.2011.10.211