Does short wavelength lithography process degrade the integrity of thin gate oxide?

Does short wavelength lithography process degrade the integrity of thin gate oxide?

Microelectronics Reliability

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Bibliographic Details
Main Authors: Kim, S.J., Cho, B.J., Chong, P.F., Chor, E.F., Ang, C.H., Ling, C.H., Joo, M.S., Yeo, I.S.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62059
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/62059

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