Does short wavelength lithography process degrade the integrity of thin gate oxide?

Does short wavelength lithography process degrade the integrity of thin gate oxide?

Microelectronics Reliability

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Bibliographic Details
Main Authors:	Kim, S.J., Cho, B.J., Chong, P.F., Chor, E.F., Ang, C.H., Ling, C.H., Joo, M.S., Yeo, I.S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62059
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Institution:	National University of Singapore

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