Does short wavelength lithography process degrade the integrity of thin gate oxide?

Microelectronics Reliability

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Bibliographic Details
Main Authors:	Kim, S.J., Cho, B.J., Chong, P.F., Chor, E.F., Ang, C.H., Ling, C.H., Joo, M.S., Yeo, I.S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62059
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62059
record_format	dspace
spelling	sg-nus-scholar.10635-620592015-03-21T06:48:43Z Does short wavelength lithography process degrade the integrity of thin gate oxide? Kim, S.J. Cho, B.J. Chong, P.F. Chor, E.F. Ang, C.H. Ling, C.H. Joo, M.S. Yeo, I.S. ELECTRICAL ENGINEERING Microelectronics Reliability 40 8-10 1609-1613 MCRLA 2014-06-17T06:46:59Z 2014-06-17T06:46:59Z 2000 Article Kim, S.J.,Cho, B.J.,Chong, P.F.,Chor, E.F.,Ang, C.H.,Ling, C.H.,Joo, M.S.,Yeo, I.S. (2000). Does short wavelength lithography process degrade the integrity of thin gate oxide?. Microelectronics Reliability 40 (8-10) : 1609-1613. ScholarBank@NUS Repository. 00262714 http://scholarbank.nus.edu.sg/handle/10635/62059 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Microelectronics Reliability
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Kim, S.J. Cho, B.J. Chong, P.F. Chor, E.F. Ang, C.H. Ling, C.H. Joo, M.S. Yeo, I.S.
format	Article
author	Kim, S.J. Cho, B.J. Chong, P.F. Chor, E.F. Ang, C.H. Ling, C.H. Joo, M.S. Yeo, I.S.
spellingShingle	Kim, S.J. Cho, B.J. Chong, P.F. Chor, E.F. Ang, C.H. Ling, C.H. Joo, M.S. Yeo, I.S. Does short wavelength lithography process degrade the integrity of thin gate oxide?
author_sort	Kim, S.J.
title	Does short wavelength lithography process degrade the integrity of thin gate oxide?
title_short	Does short wavelength lithography process degrade the integrity of thin gate oxide?
title_full	Does short wavelength lithography process degrade the integrity of thin gate oxide?
title_fullStr	Does short wavelength lithography process degrade the integrity of thin gate oxide?
title_full_unstemmed	Does short wavelength lithography process degrade the integrity of thin gate oxide?
title_sort	does short wavelength lithography process degrade the integrity of thin gate oxide?
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62059
_version_	1681085706629283840

Does short wavelength lithography process degrade the integrity of thin gate oxide?

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