Effects of annealing and temperature on SGOI fabrication using Ge condensation

10.1109/IPFA.2006.251018

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Bibliographic Details
Main Authors:	Balakumar, S., Ong, C.S., Tung, C.H., Trigg, A., Li, M.F., Kumar, R., Lo, G.Q., Balasubramanian, N., Yeo, Y.C., Kwong, D.L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70093
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70093
record_format	dspace
spelling	sg-nus-scholar.10635-700932015-01-16T19:05:18Z Effects of annealing and temperature on SGOI fabrication using Ge condensation Balakumar, S. Ong, C.S. Tung, C.H. Trigg, A. Li, M.F. Kumar, R. Lo, G.Q. Balasubramanian, N. Yeo, Y.C. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IPFA.2006.251018 Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 150-153 2014-06-19T03:08:09Z 2014-06-19T03:08:09Z 2006 Conference Paper Balakumar, S.,Ong, C.S.,Tung, C.H.,Trigg, A.,Li, M.F.,Kumar, R.,Lo, G.Q.,Balasubramanian, N.,Yeo, Y.C.,Kwong, D.L. (2006). Effects of annealing and temperature on SGOI fabrication using Ge condensation. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 150-153. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IPFA.2006.251018" target="_blank">https://doi.org/10.1109/IPFA.2006.251018</a> 1424402069 http://scholarbank.nus.edu.sg/handle/10635/70093 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/IPFA.2006.251018
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Balakumar, S. Ong, C.S. Tung, C.H. Trigg, A. Li, M.F. Kumar, R. Lo, G.Q. Balasubramanian, N. Yeo, Y.C. Kwong, D.L.
format	Conference or Workshop Item
author	Balakumar, S. Ong, C.S. Tung, C.H. Trigg, A. Li, M.F. Kumar, R. Lo, G.Q. Balasubramanian, N. Yeo, Y.C. Kwong, D.L.
spellingShingle	Balakumar, S. Ong, C.S. Tung, C.H. Trigg, A. Li, M.F. Kumar, R. Lo, G.Q. Balasubramanian, N. Yeo, Y.C. Kwong, D.L. Effects of annealing and temperature on SGOI fabrication using Ge condensation
author_sort	Balakumar, S.
title	Effects of annealing and temperature on SGOI fabrication using Ge condensation
title_short	Effects of annealing and temperature on SGOI fabrication using Ge condensation
title_full	Effects of annealing and temperature on SGOI fabrication using Ge condensation
title_fullStr	Effects of annealing and temperature on SGOI fabrication using Ge condensation
title_full_unstemmed	Effects of annealing and temperature on SGOI fabrication using Ge condensation
title_sort	effects of annealing and temperature on sgoi fabrication using ge condensation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70093
_version_	1681087135465078784

Effects of annealing and temperature on SGOI fabrication using Ge condensation

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