Effects of annealing and temperature on SGOI fabrication using Ge condensation

• Main Authors: Balakumar, S., Ong, C.S., Tung, C.H., Trigg, A., Li, M.F., Kumar, R., Lo, G.Q., Balasubramanian, N., Yeo, Y.C., Kwong, D.L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70093
• Institution: National University of Singapore

10.1109/IPFA.2006.251018