Effects of annealing and temperature on SGOI fabrication using Ge condensation

Effects of annealing and temperature on SGOI fabrication using Ge condensation

10.1109/IPFA.2006.251018

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Bibliographic Details
Main Authors: Balakumar, S., Ong, C.S., Tung, C.H., Trigg, A., Li, M.F., Kumar, R., Lo, G.Q., Balasubramanian, N., Yeo, Y.C., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70093
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/70093

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