Effects of annealing and temperature on SGOI fabrication using Ge condensation
10.1109/IPFA.2006.251018
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Main Authors: | Balakumar, S., Ong, C.S., Tung, C.H., Trigg, A., Li, M.F., Kumar, R., Lo, G.Q., Balasubramanian, N., Yeo, Y.C., Kwong, D.L. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/70093 |
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Institution: | National University of Singapore |
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