High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

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Main Authors:	Toh, S.L., Li, K., Ang, C.H., Er, E., Redkar, S., Loh, K.P., Boothroyd, C.B., Chan, L.
Other Authors:	CHEMISTRY
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/77450
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-77450
record_format	dspace
spelling	sg-nus-scholar.10635-774502015-01-23T19:08:14Z High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED Toh, S.L. Li, K. Ang, C.H. Er, E. Redkar, S. Loh, K.P. Boothroyd, C.B. Chan, L. CHEMISTRY Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 143-146 2014-06-23T05:55:11Z 2014-06-23T05:55:11Z 2004 Conference Paper Toh, S.L.,Li, K.,Ang, C.H.,Er, E.,Redkar, S.,Loh, K.P.,Boothroyd, C.B.,Chan, L. (2004). High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 143-146. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/77450 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
author2	CHEMISTRY
author_facet	CHEMISTRY Toh, S.L. Li, K. Ang, C.H. Er, E. Redkar, S. Loh, K.P. Boothroyd, C.B. Chan, L.
format	Conference or Workshop Item
author	Toh, S.L. Li, K. Ang, C.H. Er, E. Redkar, S. Loh, K.P. Boothroyd, C.B. Chan, L.
spellingShingle	Toh, S.L. Li, K. Ang, C.H. Er, E. Redkar, S. Loh, K.P. Boothroyd, C.B. Chan, L. High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED
author_sort	Toh, S.L.
title	High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED
title_short	High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED
title_full	High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED
title_fullStr	High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED
title_full_unstemmed	High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED
title_sort	high spatial resolution strain measurement of deep sub-micron semiconductor devices using cbed
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/77450
_version_	1681088466109071360

High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED

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