High spatial resolution strain measurement of deep sub-micron semiconductor devices using CBED

• Main Authors: Toh, S.L., Li, K., Ang, C.H., Er, E., Redkar, S., Loh, K.P., Boothroyd, C.B., Chan, L.
• Other Authors: CHEMISTRY
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/77450
• Institution: National University of Singapore

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA