Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction
10.1149/1.1798191
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sg-nus-scholar.10635-813312024-11-14T02:28:39Z Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction Ho, C.S. Pey, K.L. Tung, C.H. Zhang, B.C. Tee, K.C. Karunasiri, G. Chua, S.J. ELECTRICAL ENGINEERING ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.1798191 Electrochemical and Solid-State Letters 7 11 H49-H51 ESLEF 2014-10-07T03:07:09Z 2014-10-07T03:07:09Z 2004 Article Ho, C.S., Pey, K.L., Tung, C.H., Zhang, B.C., Tee, K.C., Karunasiri, G., Chua, S.J. (2004). Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction. Electrochemical and Solid-State Letters 7 (11) : H49-H51. ScholarBank@NUS Repository. https://doi.org/10.1149/1.1798191 10990062 http://scholarbank.nus.edu.sg/handle/10635/81331 000228539900049 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1149/1.1798191 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Ho, C.S. Pey, K.L. Tung, C.H. Zhang, B.C. Tee, K.C. Karunasiri, G. Chua, S.J. |
| format |
Article |
| author |
Ho, C.S. Pey, K.L. Tung, C.H. Zhang, B.C. Tee, K.C. Karunasiri, G. Chua, S.J. |
| spellingShingle |
Ho, C.S. Pey, K.L. Tung, C.H. Zhang, B.C. Tee, K.C. Karunasiri, G. Chua, S.J. Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction |
| author_sort |
Ho, C.S. |
| title |
Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction |
| title_short |
Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction |
| title_full |
Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction |
| title_fullStr |
Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction |
| title_full_unstemmed |
Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction |
| title_sort |
uniform void-free epitaxial cosi 2 formation on sti bounded narrow si(loo) lines by template layer stress reduction |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81331 |
| _version_ |
1821195689707700224 |