Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry

Accurate characterization of thin films on rough surfaces by spectroscopic ellipsometry

10.1016/j.tsf.2013.07.067

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書目詳細資料
Main Authors:	Siah, S.C., Hoex, B., Aberle, A.G.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Article
出版:	2014
主題:	Antireflection coating Depolarization Rough surfaces Silicon nitride Spectroscopic ellipsometry Thin film properties
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/81928
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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