Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation

Journal of Electronic Materials

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Bibliographic Details
Main Authors:	Lee, P.S., Mangelinck, D., Pey, K.L., Ding, J., Chi, D.Z., Dai, J.Y., See, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Agglomeration Layer inversion N2 + Implant NiSi Phase stability
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82761
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82761
record_format	dspace
spelling	sg-nus-scholar.10635-827612015-01-06T02:48:32Z Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Dai, J.Y. See, A. ELECTRICAL & COMPUTER ENGINEERING MATERIALS SCIENCE PHYSICS Agglomeration Layer inversion N2 + Implant NiSi Phase stability Journal of Electronic Materials 30 12 1554-1559 JECMA 2014-10-07T04:33:11Z 2014-10-07T04:33:11Z 2001-12 Article Lee, P.S.,Mangelinck, D.,Pey, K.L.,Ding, J.,Chi, D.Z.,Dai, J.Y.,See, A. (2001-12). Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation. Journal of Electronic Materials 30 (12) : 1554-1559. ScholarBank@NUS Repository. 03615235 http://scholarbank.nus.edu.sg/handle/10635/82761 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Agglomeration Layer inversion N2 + Implant NiSi Phase stability
spellingShingle	Agglomeration Layer inversion N2 + Implant NiSi Phase stability Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Dai, J.Y. See, A. Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation
description	Journal of Electronic Materials
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Dai, J.Y. See, A.
format	Article
author	Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Dai, J.Y. See, A.
author_sort	Lee, P.S.
title	Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation
title_short	Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation
title_full	Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation
title_fullStr	Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation
title_full_unstemmed	Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation
title_sort	nickel silicide formation on si(100) and poly-si with a presilicide n2 + implantation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82761
_version_	1681089311478382592

Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation

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