Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation

Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation

10.1149/1.1459682

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Bibliographic Details
Main Authors: Ang, C.H., Tan, S.S., Lek, C.M., Lin, W., Zheng, Z.J., Chen, T., Cho, B.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83119
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83119

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