Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation

10.1149/1.1459682

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Bibliographic Details
Main Authors:	Ang, C.H., Tan, S.S., Lek, C.M., Lin, W., Zheng, Z.J., Chen, T., Cho, B.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83119
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83119
record_format	dspace
spelling	sg-nus-scholar.10635-831192023-10-26T09:08:13Z Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation Ang, C.H. Tan, S.S. Lek, C.M. Lin, W. Zheng, Z.J. Chen, T. Cho, B.J. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.1459682 Electrochemical and Solid-State Letters 5 4 G26-G28 ESLEF 2014-10-07T04:37:29Z 2014-10-07T04:37:29Z 2002-04 Article Ang, C.H., Tan, S.S., Lek, C.M., Lin, W., Zheng, Z.J., Chen, T., Cho, B.J. (2002-04). Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation. Electrochemical and Solid-State Letters 5 (4) : G26-G28. ScholarBank@NUS Repository. https://doi.org/10.1149/1.1459682 10990062 http://scholarbank.nus.edu.sg/handle/10635/83119 000175314300016 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.1459682
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ang, C.H. Tan, S.S. Lek, C.M. Lin, W. Zheng, Z.J. Chen, T. Cho, B.J.
format	Article
author	Ang, C.H. Tan, S.S. Lek, C.M. Lin, W. Zheng, Z.J. Chen, T. Cho, B.J.
spellingShingle	Ang, C.H. Tan, S.S. Lek, C.M. Lin, W. Zheng, Z.J. Chen, T. Cho, B.J. Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
author_sort	Ang, C.H.
title	Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
title_short	Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
title_full	Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
title_fullStr	Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
title_full_unstemmed	Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
title_sort	suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83119
_version_	1781784307227951104

Suppression of nitridation-induced interface traps and hole mobility degradation by nitrogen plasma nitridation

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