A novel surface passivation process for HfO 2 Ge MOSFETs

10.1109/DRC.2004.1367762

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Bibliographic Details
Main Authors: Wu, N., Zhang, Q., Zhu, C., Chan, D.S.H., Li, M.F., Balasubramanian, N., Du, A.Y., Chin, A., Sin, J.K.O., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83406
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Institution: National University of Singapore
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