A novel surface passivation process for HfO 2 Ge MOSFETs
10.1109/DRC.2004.1367762
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Main Authors: | Wu, N., Zhang, Q., Zhu, C., Chan, D.S.H., Li, M.F., Balasubramanian, N., Du, A.Y., Chin, A., Sin, J.K.O., Kwong, D.-L. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83406 |
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Institution: | National University of Singapore |
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