New insights in hf based high-k gate dielectrics in mosfets

New insights in hf based high-k gate dielectrics in mosfets

10.1149/1.2209318

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Bibliographic Details
Main Authors: Li, M.-F., Zhu, C., Shen, C., Yu, X.F., Wang, X.P., Feng, Y.P., Du, A.Y., Yeo, Y.C., Samudra, G., Chin, A., Kwong, D.L.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84007
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/84007

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