New insights in hf based high-k gate dielectrics in mosfets

• Main Authors: Li, M.-F., Zhu, C., Shen, C., Yu, X.F., Wang, X.P., Feng, Y.P., Du, A.Y., Yeo, Y.C., Samudra, G., Chin, A., Kwong, D.L.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84007
• Institution: National University of Singapore

10.1149/1.2209318