High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric

Digest of Technical Papers - Symposium on VLSI Technology

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Bibliographic Details
Main Authors:	Yu, X., Zhu, C., Wang, X.P., Li, M.F., Chin, A., Du, A.Y., Wang, W.D., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83780
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83780
record_format	dspace
spelling	sg-nus-scholar.10635-837802015-01-09T09:22:30Z High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric Yu, X. Zhu, C. Wang, X.P. Li, M.F. Chin, A. Du, A.Y. Wang, W.D. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Digest of Technical Papers - Symposium on VLSI Technology 110-111 DTPTE 2014-10-07T04:45:06Z 2014-10-07T04:45:06Z 2004 Conference Paper Yu, X.,Zhu, C.,Wang, X.P.,Li, M.F.,Chin, A.,Du, A.Y.,Wang, W.D.,Kwong, D.-L. (2004). High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric. Digest of Technical Papers - Symposium on VLSI Technology : 110-111. ScholarBank@NUS Repository. 07431562 http://scholarbank.nus.edu.sg/handle/10635/83780 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Digest of Technical Papers - Symposium on VLSI Technology
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yu, X. Zhu, C. Wang, X.P. Li, M.F. Chin, A. Du, A.Y. Wang, W.D. Kwong, D.-L.
format	Conference or Workshop Item
author	Yu, X. Zhu, C. Wang, X.P. Li, M.F. Chin, A. Du, A.Y. Wang, W.D. Kwong, D.-L.
spellingShingle	Yu, X. Zhu, C. Wang, X.P. Li, M.F. Chin, A. Du, A.Y. Wang, W.D. Kwong, D.-L. High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric
author_sort	Yu, X.
title	High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric
title_short	High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric
title_full	High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric
title_fullStr	High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric
title_full_unstemmed	High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric
title_sort	high mobility and excellent electrical stability of mosfets using a novel hftao gate dielectric
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83780
_version_	1681089498904002560

High mobility and excellent electrical stability of MOSFETs using a novel HfTaO gate dielectric

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