Very high κ and high density TiTaO MIM capacitors for analog and RF applications

Very high κ and high density TiTaO MIM capacitors for analog and RF applications

10.1109/.2005.1469213

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Bibliographic Details
Main Authors: Chiang, K.C., Chin, A., Lai, C.H., Chen, W.J., Cheng, C.F., Hung, B.F., Liao, C.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84350
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Institution: National University of Singapore
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Summary:10.1109/.2005.1469213

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