Very high κ and high density TiTaO MIM capacitors for analog and RF applications

• Main Authors: Chiang, K.C., Chin, A., Lai, C.H., Chen, W.J., Cheng, C.F., Hung, B.F., Liao, C.C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84350
• Institution: National University of Singapore

10.1109/.2005.1469213