Very high κ and high density TiTaO MIM capacitors for analog and RF applications
10.1109/.2005.1469213
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2014
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sg-nus-scholar.10635-843502015-01-16T02:44:50Z Very high κ and high density TiTaO MIM capacitors for analog and RF applications Chiang, K.C. Chin, A. Lai, C.H. Chen, W.J. Cheng, C.F. Hung, B.F. Liao, C.C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/.2005.1469213 Digest of Technical Papers - Symposium on VLSI Technology 2005 62-63 DTPTE 2014-10-07T04:51:41Z 2014-10-07T04:51:41Z 2005 Conference Paper Chiang, K.C.,Chin, A.,Lai, C.H.,Chen, W.J.,Cheng, C.F.,Hung, B.F.,Liao, C.C. (2005). Very high κ and high density TiTaO MIM capacitors for analog and RF applications. Digest of Technical Papers - Symposium on VLSI Technology 2005 : 62-63. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/.2005.1469213" target="_blank">https://doi.org/10.1109/.2005.1469213</a> 07431562 http://scholarbank.nus.edu.sg/handle/10635/84350 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
10.1109/.2005.1469213 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Chiang, K.C. Chin, A. Lai, C.H. Chen, W.J. Cheng, C.F. Hung, B.F. Liao, C.C. |
| format |
Conference or Workshop Item |
| author |
Chiang, K.C. Chin, A. Lai, C.H. Chen, W.J. Cheng, C.F. Hung, B.F. Liao, C.C. |
| spellingShingle |
Chiang, K.C. Chin, A. Lai, C.H. Chen, W.J. Cheng, C.F. Hung, B.F. Liao, C.C. Very high κ and high density TiTaO MIM capacitors for analog and RF applications |
| author_sort |
Chiang, K.C. |
| title |
Very high κ and high density TiTaO MIM capacitors for analog and RF applications |
| title_short |
Very high κ and high density TiTaO MIM capacitors for analog and RF applications |
| title_full |
Very high κ and high density TiTaO MIM capacitors for analog and RF applications |
| title_fullStr |
Very high κ and high density TiTaO MIM capacitors for analog and RF applications |
| title_full_unstemmed |
Very high κ and high density TiTaO MIM capacitors for analog and RF applications |
| title_sort |
very high κ and high density titao mim capacitors for analog and rf applications |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84350 |
| _version_ |
1681089602375385088 |